Optical dhizaini ine huwandu hwakawanda hwekushandisa mumunda we semiconductor. Mumuchina wephotolithography, iyo optical system ine basa rekutarisa mwenje wemwenje unoburitswa nechiedza sosi uye nekuchidhirowa pasilicon wafer kuratidza dunhu redunhu. Nokudaro, dhizaini uye optimization ye optical components mu photolithography system inzira inokosha yekuvandudza kushanda kwemuchina we photolithography. Izvi zvinotevera zvimwe zvezvinhu zvemaziso zvinoshandiswa mumashini ephotolithography:
Chinangwa chekufungidzira
01 Chinangwa chekufungidzira chinhu chakakosha chemaziso mumuchina welithography, kazhinji unosanganisira nhevedzano yemalenzi anosanganisira convex lenzi, concave lenzi, uye maprisms.
02 Basa rayo nderekumisikidza seti yedunhu pane mask uye kuinangisa pawafer yakavharwa nephotoresist.
03 Kurongeka uye kuita kwechinangwa chekufungidzira kune simba rakasimba pakugadzirisa uye kunaka kwekufungidzira kwemuchina welithography.
Mirror
01 Mirroranoshandiswa kushandura gwara rechiedza nekuriendesa kunzvimbo chaiyo.
02 Mumichina yeEUV lithography, magirazi akanyanya kukosha nekuti EUV mwenje inotorwa zviri nyore nezvinhu, saka magirazi ane ratidziro yepamusoro anofanira kushandiswa.
03 Kurongeka kwepamusoro uye kugadzikana kweanoratidza zvakare kune simba guru pakuita kwemuchina welithography.
Sefa
01 Mafirita anoshandiswa kubvisa zvisingadiwe wavelengths yechiedza, kuvandudza kurongeka uye kunaka kweiyo photolithography process.
02 Nekusarudza sefa yakakodzera, inogona kuve nechokwadi chekuti chiedza chega chega chewavelength chinopinda mumushini welithography, nekudaro zvichivandudza kurongeka uye kugadzikana kweiyo lithography process.
Prisms uye zvimwe zvikamu
Uye zvakare, muchina welithography unogona zvakare kushandisa zvimwe zvekubatsira zvinhu zvemaziso, senge prisms, polarizers, nezvimwe, kusangana nezvinodiwa lithography. Sarudzo, dhizaini uye kugadzirwa kwezvinhu izvi zvemaziso zvinofanirwa kunyatso kutevedzera akakodzera tekinoroji zviyero uye zvinodiwa kuti ive nechokwadi chepamusoro uye kunyatsoshanda kwemuchina welithography.
Muchidimbu, kushandiswa kwezvinhu zvemaziso mumunda wemichina yelithography kune chinangwa chekuvandudza mashandiro uye kugadzirwa kwemashini e-lithography, nekudaro kutsigira kusimudzira kweindasitiri yekugadzira microelectronics. Nekuenderera mberi kwekuvandudza tekinoroji yelithography, iyo optimization uye hunyanzvi hwezvinhu zvemaziso zvinopawo mukana wakakura wekugadzirwa kwemachipisi echizvarwa chinotevera.
Kuti uwane rumwe ruzivo uye mazano ehunyanzvi, shanyira webhusaiti yedu pahttps://www.jiujonoptics.com/kuti udzidze zvakawanda nezve zvigadzirwa zvedu uye mhinduro.
Nguva yekutumira: Jan-02-2025
